Method for producing semiconductor light-emitting device with undoped spacer layer

ABSTRACT

A semiconductor light-emitting device includes: a semiconductor substrate of a first conductive type, and a multilayered structure formed on the semiconductor substrate. The multilayered structure includes a first cladding layer of the first conductive type, an undoped active layer, a second cladding layer of a second conductive type, and a current diffusing layer of the second conductive type which are subsequently deposited. An undoped spacer layer is provided between the undoped active layer and the second cladding layer.

This is a division of application Ser. No. 08/652,357, filed May 23,1996, U.S. Pat. No. 5,856,682.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor light-emitting devicesuch as an light-emitting diode having a current diffusing layer; and amethod for producing the same.

2. Description of the Related Art

In recent years, light-emitting diodes (hereinafter, referred to as"LEDs") have been in the limelight as display devices intended for useindoors and outdoors. Particularly, it is supposed that an outdoordisplay market will abruptly expand in the years ahead with increase inluminance of LEDs, and LEDs are expected to grow into display media soas to take the place of neon signs in future.

High-intensity LEDs have been realized for a few years in GaAlAs-typeLEDs having a double hetero (DH) structure for emitting light in ared-color frequency band for a few years. Moreover, recently, someprototypes of AlGaInP-type LEDs having a DH structure capable ofemitting light in the orange-color to green-color frequency bands havebeen proposed so as to realize high-intensity LEDs.

A portion (a) of FIG. 10 is a cross-sectional view showing a devicestructure of a conventional AlGaInP-type LED 50 capable of emittinglight in the yellow-color frequency band. A portion (b) of FIG. 10 is adiagram showing a carrier concentration profile of each layer of the LED50. The carrier concentration profile is data obtained from themeasurement using a secondary ion mass spectrometer (SIMS), and theabsolute value thereof is calibrated by the measurement data for astandard sample.

The LED 50 shown in the portion (a) of FIG. 10 has a multilayeredstructure formed by sequentially growing, on an n-type GaAs substrate 1by an MOCVD method, an n-type GaAs buffer layer 10 (thickness: about 0.1μm, Si doping amount: about 5×10¹⁷ cm⁻³), an n-type (Al₀.7 Ga₀.3)₀.5In₀.5 P cladding layer 2 (thickness: about 1.0 μm, Si doping amount:about 5×10¹⁷ cm⁻³), an undoped (Al₀.3 Ga₀.7)₀.5 In₀.5 P active layer 3(thickness: about 0.6 μm), a p-type (Al₀.7 Ga₀.3)₀.5 In₀.5 P claddinglayer 4 (thickness: about 1.0 μm, Zn doping amount: about 1×10¹⁸ cm⁻³),a p-type Al₀.7 Ga₀.3 As current diffusing layer 5 (thickness: about 6μm, Zn doping amount: about 3×10¹⁸ cm⁻³), and a p-type GaAs cap layer 6(thickness: about 1 μm, Zn doping amount: about 3×10¹⁸ cm⁻³). On theunderside of the n-type GaAs substrate 1, that is, on the surfaceopposite to the multilayered structure, an electrode 11 is formed. Onthe surface of the p-type GaAs cap layer 6, an electrode 12 is formed.In this manner, the LED 50 is constituted.

In the LED 50, a pn junction is formed inside of the active layer 3, andelectrons recombine with holes therein so that light is emitted.Intensity of the emitted light is typically about 1.5 candelas when theoperating current of about 20 mA is applied.

In the above-mentioned conventional LED 50, the active layer 3 isdesigned to be an undoped layer. However, in reality, as shown by thecarrier concentration profile obtained by a SIMS measurement in theportion (b) of FIG. 10, a p-type dopant (Zn) of the p-cladding layer 4diffuses into the active layer 3. The diffusion of the p-type dopantdegrades crystallinity of the active layer 3, which causes formation ofnon-radiative centers. As a result, efficiency of light emission of theLED 50 is degraded.

SUMMARY OF THE INVENTION

The semiconductor light-emitting device of this invention includes: asemiconductor substrate of a first conductive type; and a multilayeredstructure formed on the semiconductor substrate. The multilayeredstructure includes at least a first cladding layer of the firstconductive type, an undoped active layer, a second cladding layer of asecond conductive type, and a current diffusing layer of the secondconductive type, which are subsequently deposited. An undoped spacerlayer is further provided between the undoped active layer and thesecond cladding layer.

In one embodiment, carrier concentration of a second portion of thecurrent diffusing layer positioned remotely from the second claddinglayer is higher than the carrier concentration of a first portion of thecurrent diffusing layer positioned closely to the second cladding layer.In another embodiment, the carrier concentration continuously changes ina portion positioned between the first portion and the second portion ofthe current diffusing layer. Preferably, the carrier concentration ofthe first portion of the current diffusing layer is in a range betweenabout 0.5×10¹⁸ cm⁻³ and about 1.5×10¹⁸ cm⁻³. In addition, the carrierconcentration of the second portion of the current diffusing layer ispreferably about 2×10¹⁸ cm⁻³ or more.

Preferably, a thickness of the undoped spacer layer is in a rangebetween about 50 Å and about 2000 Å.

In still another embodiment, the semiconductor light-emitting devicefurther includes a second undoped spacer layer containing no dopantpositioned between the first cladding layer and the undoped activelayer.

In one embodiment, the first cladding layer, the undoped active layer,and the second cladding layer are formed using AlGaInP or GaInP as mainmaterial; the current diffusing layer is formed using a materialselected from a group consisting of AlGaAs, AlGaInP, GaP, and AlGaP asmain material; and a dopant of the second cladding layer Is Zn, Mg, orBe.

According to another aspect of the invention, a method for producing asemiconductor light-emitting device is provided. The method includes thesteps of: forming a multilayered structure on a semiconductor substrateof a first conductive type, the multilayered structure including atleast a first cladding layer of the first conductive type, an undopedactive layer, a second cladding layer of a second conductive type, and acurrent diffusing layer of the second conductive type; and forming anundoped spacer layer between the undoped active layer and the secondcladding layer.

In one embodiment, the current diffusing layer is formed so that carrierconcentration of a second portion of the current diffusing layerpositioned remotely from the second cladding layer is higher than thecarrier concentration of a first portion of the current diffusing layerpositioned closely to the second cladding layer. In another embodiment,the current diffusing layer is formed so that the carrier concentrationcontinuously changes in a portion positioned between the first andsecond portions of the current diffusing layer. Preferably, the carrierconcentration of the first portion of the current diffusing layer is ina range between about 0.5×10¹⁸ cm⁻³ and about 1.5×10¹⁸ cm⁻³. Inaddition, the carrier concentration of the second portion of the currentdiffusing layer is preferably about 2×10¹⁸ cm⁻³ or more.

Preferably, the thickness of the undoped spacer layer is in a rangebetween about 50 Å and about 2000 Å.

In still another embodiment, the method further includes the step offorming a second undoped spacer layer between the first cladding layerand the undoped active layer.

In one embodiment, the first cladding layer, the undoped active layer,and the second cladding layer are formed using AlGaInP or GaInP as mainmaterial; the current diffusing layer is formed using a materialselected from a group consisting of AlGaAs, AlGaInP, GaP, and AlGaP asmain material; and a dopant of the second cladding layer is Zn, Mg, orBe.

In the aforementioned semiconductor light-emitting device of the presentinvention, the undoped spacer layer is provided at least between theundoped active layer and the second cladding layer. Thus, diffusion ofthe dopant contained in the second cladding layer, which is induced bythe current diffusing layer, is blocked at the undoped spacer layer. Inthis manner, degradation of crystallinity of the active layer andresultant formation of the non-radiative centers are suppressed, makingit possible to efficiently output light to the outside.

Moreover, the carrier concentration in the portion of the currentdiffusing layer far from the second cladding layer is set to be higherthan that in the portion thereof closer to the second cladding layer, sothat the diffusion of the dopant into the active layer is reduced.

Furthermore, such diffusion of the dopant is remarkable when the firstcladding layer, the undoped active layer, and the second cladding layerare formed using AlGaInP or GaInP as the main material, and the currentdiffusing layer is formed using AlGaAs, AlGaInP, GaP, or AlGaP as themain material, and moreover, the dopant contained in the second claddinglayer is Zn, Mg, or Be. According to the present invention, theadvantage of suppressing the diffusion of the dopant can be assuredlyobtained even in such cases.

Thus, the invention described herein makes possible the advantages of(1) providing a semiconductor light-emitting device having an internalstructure of crystals exhibiting an excellent light emitting efficiency;and (2) providing a method for producing the same.

These and other advantages of the present invention will become apparentto those skilled in the art upon reading and understanding the followingdetailed description with reference to the accompanying figures.

BRIEF DESCRIPTION OF THE DRAWINGS

A portion (a) of FIG. 1 is a cross-sectional view showing a devicestructure of an LED according to a first example of the presentinvention. A portion (b) of FIG. 1 is a diagram illustrating a carrierconcentration profile of each layer included in the LED.

FIG. 2 is a diagram illustrating the relationship among the remainingthickness of an undoped spacer layer, the PL intensity, and theintensity of emitted light of the LED shown in the portion (a) of FIG.1.

FIG. 3 is a diagram illustrating the relationship between the remainingthickness of the undoped spacer layer and the intensity of emitted lightof the LED shown in the portion (a) of FIG. 1 when the carrierconcentration of the p-cladding layer is used as a parameter.

A portion (a) of FIG. 4 is a cross-sectional view showing a devicestructure of the LED according to a second example of the presentinvention. A portion (b) of FIG. 4 is a diagram showing a carrierconcentration profile of each layer included in the LED.

FIG. 5 is a diagram illustrating the relationship between the carrierconcentration of the current diffusing layer most closely positioned tothe p-cladding layer, and the designed thickness of the undoped spacerlayer of the LED shown in the portion (a) of FIG. 4.

A portion (a) of FIG. 6 is a cross-sectional view showing a devicestructure of the LED according to a third example of the presentinvention. A portion (b) of FIG. 6 is a diagram showing a carrierconcentration profile of each layer included in the LED.

FIG. 7 is a diagram illustrating the relationship between the carrierconcentration of the current diffusing layer most remotely positionedfrom the p-cladding layer, and the intensity of emitted light of the LEDshown in the portion (a) of FIG. 6, when the carrier concentration ofthe current diffusing layer most closely positioned to the p-claddinglayer is used as a parameter.

A portion (a) of FIG. 8 is a cross-sectional view showing a devicestructure of the LED according to a fourth example of the presentinvention. A portion (b) of FIG. 8 is a diagram showing a carrierconcentration profile of each layer contained in the LED.

A portion (a) of FIG. 9 is a cross-sectional view showing a devicestructure of the LED according to a fifth example of the presentinvention. A portion (b) of FIG. 9 is a diagram showing a carrierconcentration profile of each layer included in the LED.

A portion (a) of FIG. 10 is a cross-sectional view showing a devicestructure of the conventional LED. A portion (b) of FIG. 10 is a diagramshowing a carrier concentration profile of each layer included in theLED.

FIG. 11 is a cross-sectional view showing a structure of an evaluationsample used in a first experiment conducted by the present inventors.

A portion (a) of FIG. 12 is a cross-sectional view showing a structureof an LED used for evaluation in a second experiment conducted by thepresent inventors. A portion (b) of FIG. 12 is a diagram illustrating acarrier concentration profile of each layer included in the LED used forevaluation.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter, prior to the description of examples of the presentinvention, the results of the experiments conducted by the presentinventors in the process of making the present invention will bedescribed in relation to the degradation phenomenon of the crystallinityof the active layer in the aforementioned conventional LED.

First, the results of the first experiment will be described.

In the first experiment, the cap layer 6 and the current diffusing layer5 are entirely removed from the LED 50 shown in the portion (a) in FIG.10 by etching. Then, a part of a p-cladding layer 4 is removed byetching so that the remaining portion thereof has a thickness of about0.25 μm. In this manner, a sample 60 used for evaluation with astructure shown in FIG. 11 is formed. Hereinafter, the sample used forevaluating the characteristics such as shown in FIG. 11 is referred toas "a partial sample". The top layer of the partial sample 60 is athinned cladding layer 4'.

The partial sample 60 is irradiated with an Ar laser (a wavelength λ=488nm) from a surface of the cladding layer 4', and then, thephotoluminescence (PL) intensity is measured. The obtained measurementdata is typically 16 at a relative value. When the p-type dopant (in theabove example, Zn) diffuses into the active layer 3, non-radiativecenters are formed. As a result, the value of the PL intensity islowered.

On the other hand, as a comparison sample, another sample for evaluationis formed by growing each layer as undoped layers so as to have amultilayered structure similar to that of the LED 50 shown in a portion(a) of FIG. 10. Hereinafter, the thus-obtained sample used forevaluating the characteristics is referred to as "an undoped sample".When the PL intensity of the undoped sample is measured under theconditions same as those for the aforementioned partial sample 60, themeasurement data is typically 90 at a relative value.

The reason why the measurement value of the PL intensity of the partialsample 60 is lower as compared with the undoped sample is as follows: asdescribed above, due to the degradation of the active layer 3accompanied by the diffusion of the p-type dopant (in the above example,Zn) into the active layer 3, non-radiative centers are formed in theinside of the active layer 3.

In the LED structure, the p-type dopant is doped into both thep-cladding layer 4 and the p-type current diffusing layer 5. In order tofind out which of these layers is mainly responsible for the diffusionof the p-type dopant, the present inventors conducted a secondexperiment. Hereinafter, the results thereof will be described.

A portion (a) of FIG. 12 is a cross-sectional view showing a devicestructure of a sample 70 used for evaluation (hereinafter also referredto as the "evaluation sample 70") in the second experiment. A portion(b) of FIG. 12 is a diagram showing a carrier concentration profile ofeach layer in the evaluation sample 70 obtained from the SIMSmeasurement. The absolute value of the concentration profile shown inthe portion (b) of FIG. 12 is calibrated by the measurement data for thestandard sample.

The evaluation sample 70 has a multilayered structure similar to that ofthe conventional LED 50 which has already described referring to theportion (a) of FIG. 10. The layers identical to those of the LED 50 aredenoted by the same reference numerals, and the detailed descriptionthereof will be omitted. The evaluation sample 70 and the LED 50 aredifferent from each other in that the evaluation sample 70 includes thecurrent diffusing layer 5 in which the carrier concentration is loweredto about 5×10¹⁷ cm⁻³. Since the carrier concentration of the p-claddinglayer 4 is about 1×10¹⁸ cm⁻³ as is the case of the LED 50, theevaluation sample 70 includes the current diffusing layer 5 having thecarrier concentration set to be lower than that of the p-cladding layer4.

The evaluation sample 70 was subjected to the same measurement as thatconducted in the first experiment. The measurement data of the PLintensity is typically 50 at a relative value. This value is marked inthe middle point between the measurement value of the PL intensity ofthe aforementioned partial sample 60 and the measurement value of the PLintensity of the undoped sample. Moreover, as shown by the carrierconcentration profile shown in (b) of FIG. 12 which is obtained from theSIMS measurement, in the evaluation sample 70, the diffusion of thep-type dopant (Zn) into the active layer 3 is very small.

As the result of the first and second experiments described above, thediffusion of the p-type dopant (for example, Zn) into the active layer 3is induced, not by the p-cladding layer 4, but by the current diffusinglayer 5 formed on the p-cladding layer 4. That is, it is supposed thatif the p-type dopant concentration (the carrier concentration of Zn) ofthe current diffusing layer 5 is large, the diffusion of the p-typedopant (Zn) contained in the p-cladding layer 4 into the active layer 3is promoted.

In the evaluation sample 70 shown in the portion (a) of FIG. 12, theintensity of emitted light is typically about 1.5 candelas when theoperating current of about 20 mA is applied. This value is the same asthe value obtained from the measurement of the LED 50 shown in theportion (a) of FIG. 10 which is conducted under the same conditions. Thereason why these values are the same is considered as follows: In theevaluation sample 70 shown in FIG. 12, wherein the crystallinity of theactive layer 3 is improved, the carrier concentration of the currentdiffusing layer 5 is low and the current is not sufficiently diffusedtherein. Accordingly, there is not enough increase in the intensity ofemitted light for a surface emitting type light-emitting diode.

Hereinafter, the present invention will be described by way of examplesreferring to the accompanied drawings, based on the results ofexperiments and consideration regarding the disadvantages involved inthe conventional art.

EXAMPLE 1

A portion (a) of FIG. 1 is a cross-sectional view showing a devicestructure of an AlGaInP type LED 100 according to a first example of thepresent invention. A portion (b) of FIG. 1 is a diagram showing acarrier concentration profile of each layer included in the LED 100. Thecarrier concentration profile is data obtained from the measurementconducted by using a SIMS, and an absolute value thereof is calibratedby the measurement data for the standard sample.

The LED 100 shown in the portion (a) of FIG. 1 has a multilayeredstructure obtained by sequentially forming, on an n-type GaAs substrate1 by an MOCVD method, an n-type GaAs buffer layer 10 (thickness: about0.1 μm, Si doping amount: about 5×10¹⁷ cm⁻³), an n-type (Al₀.7 Ga₀.3)₀.5In₀.5 P cladding layer 2 (thickness: about 1.0 μm, Si doping amount:about 5×10¹⁷ cm⁻³), an undoped (Al₀.3 Ga₀.7)₀.5 In₀.5 P active layer 3(thickness: about 0.6 μm), a p-type (Al₀.7 Ga₀.3)₀.5 In₀.5 P claddinglayer 4 (thickness: about 1.0 μm, Zn doping amount: about 1×10¹⁸ cm⁻³),a p-type Al₀.7 Ga₀.3 As current diffusing layer 5 (thickness: about 6μm, Zn doping amount: about 3×10¹⁸ cm⁻³), and a p-type GaAs cap layer 6(thickness: about 1 μm, Zn doping amount: about 3×10¹⁸ cm⁻³). Inaddition, on the underside of the n-type GaAs substrate 1, that is, onthe surface opposite to the multilayered structure, an electrode 11 isformed. On the surface of the p-type GaAs cap layer 6, an electrode 12is formed.

Furthermore, In the LED 100, an undoped (Al₀.7 Ga₀.3)₀.5 In₀.5 P spacerlayer 21 having a thickness of about 1500 Å is formed between the activelayer 3 and the p-cladding layer 4 formed on the active layer 3. Theundoped spacer layer 21 is formed by not supplying a dopant source suchas SiH₄ (monosilane), DEZn (diethylzinc), and the like during thegrowth.

In the LED 100 with the aforementioned structure according to thepresent example, as seen in the carrier concentration profile shown inthe portion (b) of FIG. 1, the p-type dopant Zn contained in thep-cladding layer 4 diffuses into a part of the undoped spacer layer 21until about 500 Å of the spacer layer 21 remains without containing thediffused Zn. Thus, Zn does not diffuse through the entire undoped spacerlayer 21.

When the LED 100 is processed into a partial sample previously describedreferring to FIG. 11, the PL intensity is typically 80 at a relativevalue. This value corresponds to about 90% of the measurement valueobtained with the undoped sample in the previously-described firstexperiment. The reason why the PL intensity is slightly lowered isconsidered as follows: about 500 Å in thickness of the undoped spacelayer 21 remains without diffusion of Zn, causing a decrease inefficiency of injecting holes into the active layer 3 which contributesto light-emitting recombination.

Moreover, when the LED 100 is molded in a package having a diameter ofabout 5 mm and the intensity of emitted light is measured, about 5candelas of light intensity is exhibited when the operation currency ofabout 20 mA is applied.

FIG. 2 is a diagram illustrating the relationship between the remainingthickness of the undoped spacer layer 21 and the PL intensity (denotedby black circles) of the partial sample formed from the LED 100 shown inthe portion (a) of FIG. 1. Also illustrated in the figure is therelationship between the remaining thickness of the undoped spacer layer21 and the light intensity of emitted light (denoted by white circles)in the LED 100 in a complete form shown in the portion (a) of FIG. 1.Herein, "the remaining thickness of the undoped spacer 21" is defined asa difference obtained by deducting "the thickness of the region in whichZn diffuses" from "the design value of the thickness of the undopedspacer layer 21".

As shown in FIG. 2, when the remaining thickness of the undoped spacerlayer 21 is about 100 Å or more, the PL intensity is of a constantmagnitude. On the other hand, when the remaining thickness of theundoped spacer layer 21 is about 2000 Å or more, the intensity ofemitted light expressed by the unit of candela is reduced. Moreover,when the remaining thickness of the undoped spacer 21 is about 100 Å,the intensity of emitted light reaches its peak. When the remainingthickness of the undoped spacer 21 is 0 Å or less (that is, Zn diffusesinto the entire active layer 3), the intensity of emitted light issharply reduced.

FIG. 3 is a diagram illustrating the relationship between the remainingthickness of the undoped spacer layer 21 and the intensity of emittedlight, when the carrier concentration of the P-type (Al₀.7 Ga₀.3)₀.5In₀.5 P cladding layer 4 is changed from about 3×10¹⁷ cm⁻³ to about3×10¹⁸ cm⁻³ in the LED 100.

As in the case where the p-cladding layer 4 has the carrierconcentration of about 1×10¹⁸ cm⁻³ shown in FIG. 2, the intensity of theemitted light shown by the unit of candela is sharply reduced for allthe carrier concentration of the p-cladding layer 4 shown in FIG. 3 whenthe remaining thickness of the undoped spacer layer 21 is about 2000 Åor more and is about 0 Å or less (that is, when Zn diffuses into theactive layer 3). Moreover, the intensity of the emitted light reachesits peak when the remaining thickness of the undoped spacer layer 21 isabout 100 Å.

On the other hand, when the carrier concentration of the p-claddinglayer 4 is in a range between about 5×10¹⁷ cm⁻³ and about 2×10¹⁸ cm⁻³,the intensity of the emitted light is high as a whole. Accordingly, itis desirable to set the carrier concentration of the p-cladding layer 4to a range between about 5×10¹⁷ cm⁻³ and about 2×10¹⁸ cm⁻³.

EXAMPLE 2

A portion (a) of FIG. 4 is a cross-sectional view showing a devicestructure of an AlGaInP type LED 200 according to a second example ofthe present invention. A portion (b) of FIG. 4 is a diagram showing acarrier concentration profile of each layer included in the LED 200. Thecarrier concentration profile is data obtained from the measurementconducted by using a SIMS, and an absolute value thereof is calibratedby the measurement data for the standard sample.

The LED 200 shown in the portion (a) of FIG. 4 has a multilayeredstructure obtained by sequentially forming, on an n-type GaAs substrate1 by an MOCVD method, an n-type GaAs buffer layer 10 (thickness: about0.1 μm, Si doping amount: about 5×10¹⁷ cm⁻³), an n-type (Al₀.7 Ga₀.3)₀.5In₀.5 P cladding layer 2 (thickness: about 1.0 μm, Si doping amount:about 5×10¹⁷ cm⁻³), an undoped (Al₀.3 Ga₀.7)₀.5 In₀.5 P active layer 3(thickness: about 0.6 μm), a p-type (Al₀.7 Ga₀.3)₀.5 In₀.5 P claddinglayer 4 (thickness: about 1.0 μm, Zn doping amount: about 1×10¹⁸ cm⁻³),a p-type Al₀.7 Ga₀.3 As current diffusing layer 15 (thickness: about 6μm), and a p-type GaAs cap layer 6 (thickness: about 1 μm, Zn dopingamount: about 3×10¹⁸ cm⁻³). In addition, on the underside of the n-typeGaAs substrate 1, that is, on the surface opposite to the multilayeredstructure, an electrode 11 is formed. On the surface of the p-type GaAscap layer 6, an electrode 12 is formed.

Furthermore, in the LED 200, an undoped (Al₀.7 Ga₀.3)₀.5 In₀.5 P spacerlayer 21 having a thickness of about 500 Å is formed between the activelayer 3 and the p-cladding layer 4 formed thereon. The undoped spacerlayer 21 is formed by not supplying a dopant source such as SiH₄, DEZn,and the like during the growth.

Furthermore, in the LED 200, the current diffusing layer 15 is formed ina three-layered structure including a first current diffusing layer 5, asecond current diffusing layer 7, and a third current diffusing layer 8.The carrier concentrations of the respective layers 5, 7 and 8 includedin the current diffusing layer 15 are set at different values from eachother as shown in the portion (b) in FIG. 4. That is, the carrierconcentration of the first current diffusing layer 5 most closelypositioned to the p-cladding layer 4 is set to about 5×10¹⁷ cm⁻³. Thecarrier concentration of the second current diffusing layer 7 positionedbetween the first current diffusing layer 5 and the third currentdiffusing layer 8 is set to about 1×10¹⁸ cm⁻³. And the carrierconcentration of the third current diffusing layer 8 most closelypositioned to the cap layer 6 is set to about 3×10¹⁸ cm⁻³. The first tothird current diffusing layers 5, 7, and 8 are formed by sequentiallyincreasing the amount of DEZn, which is the p-type dopant source used,during the growth of the respective layers. The thicknesses of the firstto third current diffusing layers 5, 7, and 8 are set, for example, toabout 1 μm, about 2.5 μm, and about 2.5 μm, respectively.

In the LED 200 with the aforementioned structure according to thepresent example, as seen in the carrier concentration profile shown inthe portion (b) of FIG. 4, the p-type dopant Zn contained in thep-cladding layer 4 diffuses into a part of the undoped spacer layer 21until about 100 Å of the spacer layer 21 remains without containing thediffused Zn. Thus, Zn does not diffuse through the entire undoped spacerlayer 21. In the structure of above-mentioned LED 200, the remainingthickness of the undoped spacer layer 21 after the diffusion of Zn iswell controlled in an improved manner, thereby realizing the optimizedremaining thickness of about 100 Å shown in FIG. 2 with excellentreproducibility.

When the LED 200 is processed into a partial sample described referringto FIG. 11, the PL intensity is typically 88 at a relative value. Thisvalue is substantially the same as the measurement value obtained byusing the undoped sample in the previously-mentioned first experiment.

Moreover, when the LED 200 is molded in a package having a diameter ofabout 5 mm and the intensity of emitted light is measured, about 6.5candelas of light intensity is exhibited when the operation currency ofabout 20 mA is applied.

FIG. 5 is a diagram illustrating the relationship between the carrierconcentration of the first current diffusing layer 5 most closelypositioned to the p-cladding layer 4, and the design value of thethickness (designed thickness) of the undoped spacer layer 21 requiredto obtain the remaining thickness thereof of about 100 Å after thediffusion of Zn, in the LED 200 shown in FIG. 4.

As shown in FIG. 5, the smaller the carrier concentration of the firstcurrent diffusing layer 5 is, the smaller the designed thicknessbecomes. From the viewpoint of the efficiency of the production process,the smaller designed thickness of the undoped spacer layer 21 hasadvantages of reducing production cost and the time required for theprocesses. Moreover, when the first current diffusing layer 5 has acarrier concentration of about 1.5×10¹⁸ cm⁻³ or less, change in thedesigned thickness accompanied by the variation of the carrierconcentration becomes small, whereby the remaining thickness is wellcontrolled in an improved manner. Accordingly, it is desirable that thecarrier concentration of the first current diffusing layer 5 is set toabout 1.5×10¹⁸ cm⁻³ or less.

On the other hand, when the carrier concentration of the first currentdiffusing layer 5 is set to about 5×10¹⁷ cm⁻³ or less, for example,about 3×10¹⁷ cm⁻³, problems arise that the amount of carriers becomestoo small, resulting in increase in the device resistance. Accordingly,it is desirable that the carrier concentration of the first currentdiffusing layer 5 is set to about 5×10¹⁷ cm⁻³ or more.

As a result, it is appropriate that the carrier concentration of thefirst current diffusing layer 5 is set in a range between about 5×10¹⁷cm⁻³ and about 1.5×10¹⁸ cm⁻³.

EXAMPLE 3

A portion (a) of FIG. 6 is a cross-sectional view showing a devicestructure of an AlGaInP type LED 300 according to a third example of thepresent invention. A portion (b) of FIG. 6 is a diagram showing acarrier concentration profile of each layer included in the LED 300. Thecarrier concentration profile is data obtained from the measurementconducted by using a SIMS, and an absolute value thereof is calibratedby the measurement data for the standard sample.

The LED 300 shown in the portion (a) of FIG. 6 has a multilayeredstructure obtained by sequentially forming, on an n-type GaAs substrate1 by an MOCVD method, an n-type GaAs buffer layer 10 (thickness: about0.1 μm, Si doping amount: about 5×10¹⁷ cm⁻³), an n-type (Al₀.7 Ga₀.3)₀.5In₀.5 P cladding layer 2 (thickness: about 1.0 μm, Si doping amount:about 5×10¹⁷ cm⁻³), an undoped (Al₀.3 Ga₀.7)₀.5 In₀.5 P active layer 3(thickness: about 0.6 μm), a p-type (Al₀.7 Ga₀.3)₀.5 In₀.5 P claddinglayer 4 (thickness: about 1.0 μm, Mg doping amount: about 1×10¹⁸ cm⁻³),a p-type Al₀.7 Ga₀.3 As current diffusing layer 15 (thickness: about 6μm), and a p-type GaAs cap layer 6 (thickness: about 1 μm, Mg dopingamount: about 3×10¹⁸ cm⁻³). In addition, on the underside of the n-typeGaAs substrate 1, that is, on the surface opposite to the multilayeredstructure, an electrode 11 is formed. On the surface of the p-type GaAscap layer 6, an electrode 12 is formed.

Furthermore, In the LED 300, an undoped (Al₀.7 Ga₀.3)₀.5 In₀.5 P spacerlayer 21 having a thickness of about 500 Å is formed between the activelayer 3 and the p-cladding layer 4 formed thereon. The undoped spacerlayer 21 is formed by not supplying a dopant source such as SiH₄, CP₂ Mg(cyclopentadienyl magnesium), and the like during the growth.

Furthermore, in the LED 300, a current diffusing layer 15 is formed in athree-layered structure including a first current diffusing layer 5, asecond current diffusing layer 7, and a third current diffusing layer 8.The carrier concentration of the respective layers included in thecurrent diffusing layer 15 is set in such a manner that the carrierconcentration of the first current diffusing layer 5 most closelypositioned to the p-cladding layer 4 is about 5×10¹⁷ cm⁻³ and thecarrier concentration of the third current diffusing layer 8 mostclosely positioned to the cap layer 6 is about 3×10¹⁸ cm⁻³, as shown inthe portion (b) in FIG. 6. Furthermore, the carrier concentration of thesecond current diffusing layer 7 positioned therebetween is continuouslychanged as shown in the portion (b) in FIG. 6. The first to thirdcurrent diffusing layers 5, 7, and 8 are formed by sequentiallyincreasing the amount of CP₂ Mg, which is the p-type dopant source used,during the growth of the respective layers. Particularly, when thesecond current diffusing layer 7 is formed, the amount of supply of CP₂Mg is gradually increased from the amount used for the growth of thefirst current diffusing layer 5 to that for the growth of the thirdcurrent diffusing layer 8 during the growth of the second currentdiffusing layer 7. The thicknesses of the first to third currentdiffusing layers 5, 7, and 8 are set, for example, to about 1 μm, about2.5 μm, and about 2.5 μm, respectively.

In the LED 300 with the aforementioned structure according to thepresent example, as seen in the carrier concentration profile shown inthe portion (b) of FIG. 6, the p-type dopant Mg contained in thep-cladding layer 4 diffuses into a part of the undoped spacer layer 21until about 100 Å of the spacer layer 21 remains without containing thediffused Mg. Thus, Mg does not diffuse through the entire undoped spacerlayer 21.

In the structure of above-mentioned LED 300, the current diffuses in thecurrent diffusing layer 15 even better than in the case of the structureof the LED 200 in the second example.

When the LED 300 is processed into a partial sample described referringto FIG. 11, the PL intensity is typically 88 at a relative value. Thisvalue is substantially the same as the measurement value obtained byusing the undoped sample in the previously-described first experiment.

Moreover, when the LED 300 is molded in a package having a diameter ofabout 5 mm and the intensity of emitted light is measured, about 6.7candelas of light intensity is exhibited when the operation currency ofabout 20 mA is applied.

FIG. 7 is a diagram illustrating the relationship, with respect to theLED 300 shown in FIG. 6, between the carrier concentration of the thirdcurrent diffusing layer 8 most remotely positioned from the p-claddinglayer 4, and the intensity of emitted light when the carrierconcentration of the first current diffusing layer 5 most closelypositioned to the p-cladding layer 4 is changed in a range between about5×10¹⁷ cm⁻³ and about 1.5×10¹⁸ cm⁻³ as a parameter. As shown in FIG. 7,in order to obtain the stable intensity of emitted light, it isappropriate that the carrier concentration of the third currentdiffusing layer 8 is set to about 2×10¹⁸ cm⁻³ or more.

EXAMPLE 4

A portion (a) of FIG. 8 is a cross-sectional view showing a devicestructure of an AlGaInP type LED 400 according to a fourth example ofthe present invention. A portion (b) of FIG. 8 is a diagram showing acarrier concentration profile of each layer included in the LED 400. Thecarrier concentration profile is data obtained from the measurementconducted by using a SIMS, and an absolute value thereof is calibratedby the measurement data for the standard sample.

The LED 400 shown in the portion (a) of FIG. 8 has a multilayeredstructure obtained by sequentially forming, on an n-type GaAs substrate1 by an MOCVD method, an n-type GaAs buffer layer 10 (thickness: about0.1 μm, Si doping amount: about 5×10¹⁷ cm⁻³, an n-type (Al₀.7 Ga₀.3)₀.5In₀.5 P cladding layer 2 (thickness: about 1.0 μm, Si doping amount:about 5×10¹⁷ cm⁻³), an undoped (Al₀.3 Ga₀.7)₀.5 In₀.5 P active layer 3(thickness: about 0.6 μm), a p-type (Al₀.7 Ga₀.3)₀.5 In₀.5 P claddinglayer 4 (thickness: about 1.0 μm, Mg doping amount: about 1×10¹⁸ cm⁻³),a p-type GaP current diffusing layer 25 (thickness: about 6 μm), and ap-type GaAs cap layer 6 (thickness: about 1 μm, Mg doping amount: about3×10¹⁸ cm⁻³). In addition, on the underside of the n-type GaAs substrate1, that is, on the surface opposite to the multilayered structure, anelectrode 11 is formed. On the surface of the p-type GaAs cap layer 6,an electrode 12 is formed.

Furthermore, In the LED 400, an undoped (Al₀.7 Ga₀.3)₀.5 In₀.5 P spacerlayer 21 having a thickness of about 500 Å is formed between the activelayer 3 and the p-cladding layer 4 formed thereon. The undoped spacerlayer 21 is formed by not supplying a dopant source such as SiH₄, CP₂Mg, and the like during the growth.

Furthermore, in the LED 400, a current diffusing layer 25 is formed toinclude a first current diffusing layer 35, a second current diffusinglayer 37, and a third current diffusing layer 38. The carrierconcentration of the respective layers included in the current diffusinglayer 25 is set in such a manner that the carrier concentration of thefirst current diffusing layer 35 most closely positioned to thep-cladding layer 4 is about 5×10¹⁷ cm⁻³ and the carrier concentration ofthe third current diffusing layer 38 most closely positioned to the caplayer 6 is set to about 3×10¹⁸ cm⁻³, as shown in the portion (b) in FIG.8. Moreover, the carrier concentration of the second current diffusinglayer 37 positioned therebetween is continuously changed as shown in theportion (b) in FIG. 8.

Furthermore, in the third current diffusing layer 38 made of p-type GaP,an undoped GaP layer 32 having a thickness of about 1000 Å is formed.

The first to third current diffusing layers 35, 37, and 38 are formed bysequentially increasing the amount of supply of CP₂ Mg, which is ap-type dopant source used, during the growth of the respective layers.Particularly, when the second current diffusing layer 37 is formed, theamount of supply of CP₂ Mg is gradually increased from the amount usedfor the growth of the first current diffusing layer 35 to that for thegrowth of the third current diffusing layer 38 during the growth of thesecond current diffusing layer 37. The thicknesses of the first to thirdcurrent diffusing layers 35, 37, and 38 are set, for example, to about 1μm, about 2.5 μm, and about 2.5 μm, respectively.

In the LED 400 with the aforementioned structure according to thepresent example, as seen in the carrier concentration profile shown inthe portion (b) of FIG. 8, the p-type dopant Mg contained in thep-cladding layer 4 diffuses into a part of the undoped spacer layer 21until about 100 Å of the spacer layer 21 remains without containing thediffused Mg. Thus, Mg does not diffuse through the entire undoped spacerlayer 21. And the p-type dopant Mg contained in the third p-type GaPcurrent diffusing layer 38 diffuses into the entire undoped GaP layer32, so that the GaP layer 32 has a carrier concentration of about 2×10¹⁸cm⁻³.

Moreover, by providing the undoped GaP layer 32 in the third p-type GaPcurrent diffusing layer 38, the top surface of the growing layer has anexcellent morphology. In this manner, the electrode 12 can be easilyformed on the surface of the cap layer 6 after the growth thereof.

When the LED 400 is processed into a partial sample described referringto FIG. 11, the PL intensity is typically 88 at a relative value. Thisvalue is substantially the same as the measurement value obtained byusing the undoped sample in the previously-described first experiment.

Moreover, when the LED 400 is molded in a package having a diameter ofabout 5 mm and the light intensity of emitted light is measured, about 7candelas of light intensity is exhibited when the operation currency ofabout 20 mA is applied.

When the undoped layer 32 formed in the third current diffusing layer 38is formed in the structure of the LED 200 described in the secondexample or the LED 300 described in the third example, the sameadvantages can be obtained as those described above.

EXAMPLE 5

A portion (a) of FIG. 9 is a cross-sectional view showing a devicestructure of an AlGaInP type LED 500 according to the fifth example ofthe present invention. A portion (b) of FIG. 9 is a diagram showing acarrier concentration profile of each layer included in the LED 500. Thecarrier concentration profile is data obtained from the measurementconducted by using a SIMS, and an absolute value thereof is calibratedby the measurement data for the standard sample.

The LED 500 shown in the portion (a) of FIG. 9 has a multilayeredstructure obtained by sequentially forming, on an n-type GaAs substrate1 by an MOCVD method, an n-type GaAs buffer layer 10 (thickness: about0.1 μm, Si doping amount: about 5×10¹⁷ cm⁻³), an n-type (Al₀.7 Ga₀.3)₀.5In₀.5 P cladding layer 2 (thickness: about 1.0 μm, Si doping amount:about 5×10¹⁷ cm⁻³), an undoped (Al₀.3 Ga₀.7)₀.5 In₀.5 P active layer 3(thickness: about 0.6 μm), a p-type (Al₀.7 Ga₀.3)₀.5 In₀.5 P claddinglayer 4 (thickness: about 1.0 μm, Mg doping amount: about 1×10¹⁸ cm⁻³),a p-type Al₀.7 Ga₀.3 As current diffusing layer 15 (thickness: about 6μm), and a p-type GaAs cap layer 6 (thickness: about 1 μm, Mg dopingamount: about 3×10¹⁸ cm⁻³). In addition, on the underside of the n-typeGaAs substrate 1, that is, on the surface opposite to the multilayeredstructure, an electrode 11 is formed. On the surface of the p-type GaAscap layer 6, an electrode 12 is formed.

Furthermore, In the LED 500, an undoped (Al₀.7 Ga₀.3)₀.5 In₀.5 P spacerlayer 21 having a thickness of about 500 Å is formed between the activelayer 3 and the p-cladding layer 4 formed thereon. The undoped spacerlayer 21 is formed by not supplying a dopant source such as SiH₄, CP₂Mg, and the like during the growth.

Furthermore, in the LED 500, the current diffusing layer 15 is formed ina three-layered structure including a first current diffusing layer 5, asecond current diffusing layer 7, and a third current diffusing layer 8.The carrier concentration of the respective layers included in thecurrent diffusing layer 15 is set in such a manner that the carrierconcentration of the first carrier diffusing layer 5 most closelypositioned to the p-cladding layer 4 is about 5×10¹⁷ cm⁻³ and thecarrier concentration of the third current diffusing layer 8 mostclosely positioned to the cap layer 6 is about 3×10¹⁸ cm⁻³ as shown inthe portion (b) in FIG. 9. Moreover, the carrier concentration of thesecond current diffusing layer 7 positioned therebetween is continuouslychanged as shown in the portion (b) of FIG. 9. The first to thirdcurrent diffusing layers 5, 7, and 8 are formed by sequentiallyincreasing the amount of supply of CP₂ Mg, which is the p-type dopantsource, during the growth of the respective layers. Particularly, whenthe second current diffusing layer 7 is formed, the amount of CP₂ Mg isgradually increased from the amount used for the growth of the firstcurrent diffusing layer 5 to that for the growth of the third currentdiffusing layer 8 during the growth of the second current diffusinglayer 7. The thicknesses of the first to third current diffusing layers5, 7, and 8 are set, for example, to about 1 μm, about 2.5 μm, and about2.5 μm, respectively.

Moreover in the LED 500 of the present example, an undoped (Al₀.7Ga₀.3)₀.5 In₀.5 P spacer layer 23 having a thickness of about 1000 Å isformed between the active layer 3 and the n-cladding layer 2 formedbeneath the active layer 3. The undoped spacer layer 23 serves toprevent Si doped into the n-cladding layer 2 from diffusing in theactive layer 3. The undoped spacer layer 23 is formed by not supplying adopant source such as SiH₄, CP₂ Mg, and the like during the growth.

When the LED 500 is processed into a partial sample described referringto FIG. 11, the PL intensity is typically 90 at a relative value. Thisvalue is substantially the same as the measurement value obtained byusing the undoped sample in the previously-described first experiment.

Moreover, when the LED 500 is molded in a package having a diameter ofabout 5 mm and the light intensity of emitted light is measured, about6.7 candelas of light intensity is exhibited when the operation currencyof about 20 mA is applied.

When the undoped spacer layer 23 between the n-cladding layer 2 and theactive layer 3 is formed in the structure of the LEDs 100 to 400described in the first to fourth examples, the same advantages can beobtained as those described above.

The current diffusing layer in the LEDs used as light-emitting devicesof the present invention is not limited to an AlGaAs layer or a GaPlayer. Alternatively, the current diffusing layer can be an AlGaInPlayer or an AlGaP layer. Moreover, in the present invention, theremarkable advantages can be obtained when using AlGaInP type material.However, the application of the present invention is not limited to thisparticular type of the material, but the same advantages as thosedescribed above can be obtained from the light-emitting devices mainlyconstituted by other types of the material such as the AlGaAs type,GaInPAs type, or AlGaInN type material. Moreover, although Zn or Mg isused as the p-type dopant in the aforementioned examples, the presentinvention is also effective when Be is used as the p-type dopant.

A method for forming the respective layers included in the multilayeredstructure is not limited to the MOCVD method mentioned above.Alternatively, other film formation methods generally used in asemiconductor technology, such as an MBE method, a gas source MBEmethod, a CBE method, and the like can be employed.

Furthermore, according to the present invention, when the relationshipof conductive types (i.e., p-type and n-type) of the respective layersin the multilayered structure as well as of the dopants is reversed, then-type dopant contained in the n-type cladding layer formed on theactive layer is prevented from diffusing into the active layer. As aresult, the same effect as those described in the examples can beobtained.

As described above, according to the present invention, a semiconductorlight-emitting device has a multilayered structure including at least afirst cladding layer of a first conductive type (for example, n-type),an undoped active layer, a second cladding layer of a second conductivetype (for example, p-type), and a current diffusing layer of the secondconductive type, formed on a semiconductor substrate of the firstconductive type. In this structure, an undoped spacer layer is providedat least between the undoped active layer and the second cladding layerof the second conductive type. In this manner, the diffusion of dopantof the second conductive type contained in the second cladding layer ofthe second conductive type, which is induced by the current diffusinglayer, is blocked at the undoped spacer layer. As a result, thedegradation of crystallinity of the active layer caused by the diffusionof dopant and the resultant formation of non-radiative centers issuppressed. Consequently, a semiconductor light-emitting device such asan LED having an excellent light emitting efficiency can be obtained.

It is desirable that the thickness of the undoped spacer layer is set sothat a portion thereof with a predetermined thickness remains undopedwith dopant even if the dopant diffuses from the second cladding layerof the second conductive type into the undoped spacer layer.Specifically, the thickness of the undoped spacer layer is preferablyset in a range between about 50 Å and about 2000 Å.

Moreover, another undoped spacer layer can be further provided betweenthe undoped active layer and the first cladding layer of the firstconductive type provided beneath the active layer. In this manner, thediffusion of dopant of the first conductive type from the first claddinglayer into the active layer can be suppressed.

Various other modifications will be apparent to and can be readily madeby those skilled in the art without departing from the scope and spiritof this invention. Accordingly, it is not intended that the scope of theclaims appended hereto be limited to the description as set forthherein, but rather that the claims be broadly construed.

What is claimed is:
 1. A method for producing a semiconductorlight-emitting device, comprising the steps of:forming a multilayeredstructure on a semiconductor substrate of a first conductive type, themultilayered structure including at least a first cladding layer of thefirst conductive type, an undoped active layer, a second cladding layerof a second conductive type, and a current diffusing layer of the secondconductive type; and forming an undoped spacer layer between the undopedactive layer and the second cladding layer.
 2. A method according toclaim 1, wherein the current diffusing layer is formed so that carrierconcentration of a second portion of the current diffusing layerpositioned remotely from the second cladding layer is higher than thecarrier concentration of a first portion of the current diffusing layerpositioned closely to the second cladding layer.
 3. A method accordingto claim 2, wherein the current diffusing layer is formed so that thecarrier concentration continuously changes in a portion positionedbetween the first and second portions of the current diffusing layer. 4.A method according to claim 3, wherein the carrier concentration of thefirst portion of the current diffusing layer is in a range between about0.5×10¹⁸ cm⁻³ and about 1.5×10¹⁸ cm⁻³.
 5. A method according to claim 4,wherein the carrier concentration of the second portion of the currentdiffusing layer is about 2×10¹⁸ cm⁻³ or more.
 6. A method according toclaim 2, wherein the carrier concentration of the first portion of thecurrent diffusing layer is in a range between about 0.5×10¹⁸ cm⁻³ andabout 1.5×10¹⁸ cm⁻³.
 7. A method according to claim 6, wherein thecarrier concentration of the second portion of the current diffusinglayer is about 2×10¹⁸ cm⁻³ or more.
 8. A method according to claim 1wherein the thickness of the undoped spacer layer is in a range betweenabout 50 Å and about 2000 Å.
 9. A method according to claim 1, furthercomprising the step of forming a second undoped spacer layer between thefirst cladding layer and the undoped active layer.
 10. A methodaccording to claim 1, wherein the first cladding layer, the undopedactive layer, and the second cladding layer are formed using AlGaInP orGaInP as main material; the current diffusing layer is formed using amaterial selected from a group consisting of AlGaAs, AlGaInP, GaP, andAlGaP as main material; and a dopant of the second cladding layer is Zn,Mg, or Be.